Facility

Available for external users
Nanofabrication cleanroom for device process research, mainly for semiconductor materials. It can be used for trials using a wide variety of materials and is suitable for everything from small samples to wafer substrates, making it suitable not only for basic fundamental research, but also for developmental R&D with an eye toward application.

Available for external users
This super dry room boasts the world's highest level of accuracy. With an air supply dew point of -90℃ or lower and a very low moisture content of only 0.1 ppm or less, the room can be used for a wide range of applications from small battery prototyping to battery evaluation and analytical evaluation. The room provides a non-aqueous environment ideal for the development and analysis of next-generation storage batteries.

It is a single crystal X-ray diffractometer with an auto sample changer. 48 samples are stored in the sample container. The sample capillary in the container is auto mounted to the diffractometer by a robot arm and auto sample position adjustment to the X-ray center is carried out. XRD data of many samples are obtained by continuous unattended operation and they lead to discovery of new materials.

The facilities include a variety of equipment to support bio-related experiments. The equipment in the photo is Micro X-ray CT Imaging System in the facilities. Various types of specimens, such as small laboratory animals (mice and rats) and organs, can be photographed, and high-resolution data can be obtained and analyzed noninvasively and over time with as little exposure as possible. The device itself is shielded, so there is no risk of radiation exposure to the operator.

This refrigerator cools and liquefies hydrogen using the magnetocaloric effect, in which temperature of magnetic materials changes with changes in surrounding magnetic field. By moving magnetic materials in and out of the magnetic field applied by a superconducting magnet, the heat of the electromagnet due to change in the magnetic field is reduced and highly efficient hydrogen liquefaction is realized.

This is a concept-demonstrating system that produces high-purity hydrogen gas (99.9999% and above) in large quantities (100 liters per hour) from hydrocarbon gas and carbon dioxide gas. It is utilized in the research and development of advanced catalyst materials and reaction systems, aiming for the practical implementation of 'clean hydrogen' that involves no atmospheric discharge of carbon dioxide during production.