Realization of field-emission point electron source suitable for industrial application

Using microfab techniques fitting for production, we have developed a LaB₆ nanoneedle cold field-emission electron source with unprecedented stability of 1% fluctuation in 100 hours of continuous operation. A sub-Å resolution was achieved when mounted on an electron microscope, showing performance surpassing contemporary electron sources. Benefiting from this technological breakthrough, a new generation of electron microscopes is expected. This achievement is based on collaboration with JEOL, UNC and NIMS(Tang Shuai, Tang Jie, Uzuhashi Jun, Ohkubo Tadakatsu, Takeguchi Masaki)

Title	A Stable LaB6 Nanoneedle Field-Emission Electron Source for Atomic Resolution Imaging with a Transmission Electron Microscope
Journal	Materials Today
Date	July 5, 2022 JST
DOI	10.1016/j.mattod.2022.06.003