第4回マテリアル基盤セミナー

2024年3月15日 (金) 15 : 00 - 16 : 00

千現地区 先進構造材料研究棟 5F会議室
※講演の録画・録音は禁止です。
※会場がいつもと異なりますのでご注意ください。

ナノ美 : Your Next Electron Microscope

We are developing a public license hardware and software platform to build an electron microscope, the NanoMi [1,2]. NanoMi utilizes electrostatic optics making it easy to manufacture. The electron optics is modular with components placed either on a 5-inch diameter half pipe, or in a v-groove, at nearly arbitrary locations. Various electron-optical arrangements can be quickly explored and the electron optics is independent from its vacuum envelope.
The design targets are: acceleration voltage is 50 kV, to reduce cost and x-ray hazard; up to 10 nm spatial resolution in TEM, SEM and STEM mode and electron diffraction (ED) capability. A single Linux computer is used to control NanoMi over a digital IO board, and a Canon M50 digital camera used to collect images from a fluorescent screen.

[1] Micron 163, (2022) 103362.
[2] nanomi.org and https://github.com/NRC-NANOmi/NanoMi