Realization of field-emission point electron source suitable for industrial application

2022.07.05

Using microfab techniques fitting for production, we have developed a LaB6 nanoneedle cold field-emission electron source with unprecedented stability of 1% fluctuation in 100 hours of continuous operation. A sub-Å resolution was achieved when mounted on an electron microscope, showing performance surpassing contemporary electron sources. Benefiting from this technological breakthrough, a new generation of electron microscopes is expected. This achievement is based on collaboration with JEOL, UNC and NIMS(Tang Shuai, Tang Jie, Uzuhashi Jun, Ohkubo Tadakatsu, Takeguchi Masaki)
Related Image

Article Information

Title A Stable LaB6 Nanoneedle Field-Emission Electron Source for Atomic Resolution Imaging with a Transmission Electron Microscope
Journal Materials Today
Date July 5, 2022 JST
DOI 10.1016/j.mattod.2022.06.003