Electron Microscopy Unit | NIMS

Facilities in our unit are listed in 5 categories as belows;

• (S/)TEM (Scannning/ Transmission Electron Microscope) 
• FIB (Focused Ion Beam) / SEM (Scanning Electron Microscope) 
• Specialized Holders 
• Other equipments for TEM/SEM samples preparation 
• Analyses Programs 

(S/)TEM (Scannning/ Transmission Electron Microscope)

Structural and elemental analyses at the atomic or nano-scale.

System	Talos F200X G2 (Thermo Fisher Scientific)	TENSOR (Tescan)	JEM-ARM300F (JEOL)	JEM-ARM200F-B (JEOL)	Spectra Ultra (Thermo Fisher Scientific)
Photo
Place	Sengen-site Physical Analysis Lab. #128	Sengen-site Advanced Structural Materials Bldg. #114	Sengen-site Advanced Structural Materials Bldg. #116	Sengen-site Fine Processing Lab. #125	Sengen-site Physical Analysis Lab. #127 (Operation Desk #105)
ARIM	○	×	×	○ (ARIM page )	×
NOF	○	×	×	○ (NOF ページへ )	×
Internal	○	○	○	○	○
Accel. Voltage	200, 80 kV	100 kV	300, 200, 120, 80 kV	200, 80, 60 kV	300, 200, 60, 30 kV
EDS	Super-X	Dual Type (Windowless)	Dual Type (2×158mm2)	Dual Type (Solid angle 1.96srad=2×0.98srad)	Ultra-X (Max. 4.45srad)
EELS	-	-	GATAN ContinuumER	GATAN Quantum	Gatan Continuum S
RMKS	TEM&STEM / EDS / Tomography / DPC	STEM only / 72,000-Hz-precession-assisted (PED) 4D-STEM	ASTAR Precession Diffraction	Electron holography / Tomography	16-segmented STEM detector (BF/DF/HAADF) / DPC / iDPC / Tomography

System	Talos F200X G2 (Thermo Fisher Scientific)	JEM-2800 (JEOL)	JEM-2100F1 (JEOL)	JEM-2100F2 (JEOL)	JEM-2100 (JEOL)
Photo
Place	Namiki-site WPI-MANA Bldg. #W-102	Sengen-site Advanced Structural Materials Bldg. #115	Sengen-site Physical Analysis Lab. #126	Sengen-site Physical Analysis Lab. #117	Sengen-site Physical Analysis Lab. #119
ARIM	×	×	○ (ARIM page )	○ (ARIM page )	○ (ARIM page )
NOF	×	○ (NOF page )	○ (NOF page )	○ (NOF page )	○ (NOF page )
Internal	○	○	○	○	○
Accel. Voltage	200, 80 kV	200 kV	200, 120, 100 kV	200 kV	200, 160, 120, 100, 80 kV
EDS	Super-X	Dual Type (2×100mm2)	Spot analysis and Elemental mapping	Spot analysis and Elemental mapping	Spot analysis
EELS	-	GATAN QuantumER	GATAN Enfina	GATAN Enfina	-
RMKS	TEM&STEM / EDS / Tomography / DPC	ASTAR Precession Diffraction	STEM: ADF and BF / Tomography	STEM: ADF and BF / Tomography	-

FIB (Focused Ion Beam) / SEM (Scanning Electron Microscope)

TEM samples preparation by FIB (or FIB-SEM) systems, or SEM analyses.

System	Helios 650 (Thermo Fisher Scientific)	NB5000 (Hitachi High-Tech)	JIB-4000 (JEOL)	JEM-9320FIB (JEOL)	JEM-9310FIB (JEOL)	Scios2 (Thermo Fisher Scientific)
Photo
Place	Sengen-site Physical Analysis Lab. #129	Sengen-site Physical Analysis Lab. #129	Sengen-site Physical Analysis Lab. #115	Sengen-site Physical Analysis Lab. #115	Sengen-site Physical Analysis Lab. #212	Sengen-site Advanced Structural Materials Bldg. #108
ARIM	○ (ARIM page )	○ (ARIM page )	○ (ARIM page )	○ (ARIM page )	○ (ARIM page )	×
NOF	○ (NOF page )	○ (NOF page )	○ (NOF page )	○ (NOF page )	○ (NOF page )	○ (NOF page )
Internal	○	○	○	○	○	○

System	AurigaLaser (CarlZeiss)	SMF-1000 (Hitachi High-Tech)	JSM-7900F (JEOL)	Ethos NX5000 (Hitachi High-Tech)	TM4000PlusII (Hitachi High-Tech)
Photo
Place	Sengen-site Advanced Structural Materials Bldg. #109	Sengen-site Advanced Structural Materials Bldg. #109	Sengen-site Advanced Structural Materials Bldg. #208	Namiki-site Quake-Free Lab. #107	Namiki-site High Voltage Electron Microscope Lab. #110
ARIM	×	○ (ARIM page )	×	○ (ARIM page )	○ (ARIM page )
NOF	○ (NOF page )	○ (NOF page )	○ (NOF page )	○ (NOF page )	○ (NOF page )
Internal	○	○	○	○	○

Specialized Holders

Holder	Model 636 (Gatan)	Lightning (DENSsolutions)	Model 652 (Gatan)	EM-21311HTR (JEOL)
Photo
Type	Double-tilt LN2 cryo TEM holder	Double-tilt bias and heating TEM holder	Double tilt heating holder	High-tilt specimen retainer
Place	Sengen-site Physical Analysis Lab. #106	Sengen-site Physical Analysis Lab. #106	Sengen-site Physical Analysis Lab. #106	Sengen-site Physical Analysis Lab. #106

Other equipments for TEM/SEM samples preparation

Usage Guideline of Sample Preparation Room, #103, Physical Analysis Lab. Bldg., Sengen

• ISOMET Low Speed Saw (Buehler) 
• Model 691 PIPS (Gatan) 
• Multiprep System (Allied) 
• Model 656 Dimple Grinder (Gatan) 
• EM-09100IS (JEOL) 
• Model 695 PIPS II (Gatan) 
• EM UC6 (Leica) 
• Pick-up System 
• Carbon coater JEC -560 (JEOL) 
• Osmium coater NL-OPC80A , HPC-1SW
• Platinum coater JFC-1600 (JEOL) 
• Au coater JFC-1500 
• High clean vacuum coater SVC-700 
• Ultrasonic Disc Cutter Model 601 
• Model 682 (Gatan) 
 * Please bring your own target materials for evaporation source.

• Hydrophilization treatment equipment DII-29020HD 

• Model 1040 Nanomill (Fischione) 
• Model 695 PIPS II (Gatan) 
• Model 656 Dimple Grinder (Gatan) 
• VES-30T 
• ML-180 DoctorLap 
• MS2 MICROSAW (TECHNOORG-LINDA) 

Analyses Programs

Program	HRTEM Analysis System	Electron Tomography Analysis System	DPC analysis System
Photo
Overview	A program for making crystal model and simulation of high resolution image and diffraction pattern.	A program for tomography analysis.	A program for analysis of electric and magnetic fields by 4D-STEM.
Place	Sengen-site Physical Analysis Lab. #106	Sengen-site Physical Analysis Lab. #106	Sengen-site Physical Analysis Lab. #106
RMKS	* N/A for ARIM		* N/A for ARIM