EM Unit

Facilities List

 Facilities in our unit are listed in 5 categories as belows;

  • (S/)TEM (Scannning/ Transmission Electron Microscope) 
  • Atom Probe Tomography (APT) 
  • FIB (Focused Ion Beam) / SEM (Scanning Electron Microscope) 
  • Specialized Holders 
  • Other equipments for TEM/SEM samples preparation 
  • Analyses Programs 

    • (S/)TEM (Scannning/ Transmission Electron Microscope)

     Structural and elemental analyses at the atomic or nano-scale. 　　　 　　　 　　　 　　　 　　　 　　　 　　　
    System JEM-ARM200F-G
    (JEOL)    		 JEM-ARM300F
    (JEOL)    		 JEM-ARM200F-B
    (JEOL)    		 Spectra Ultra  NEW 
    (Thermo Fisher Scientific)
    Photo
    Place Sengen-site
    Materials Reliability Lab. #118    		 Sengen-site
    Advanced Structural Materials Bldg. #116    		 Sengen-site
    Fine Processing Lab. #125    		 Sengen-site
    Physical Analysis Lab. #127
    (Operation Desk #105)
    ARIM ○ (ARIM page) N/A ○ (ARIM page) N/A
    NOF ○ (NOF page) N/A ○ (NOF page) N/A
    Internal ○ ○ ○ ○
    Accel. Voltage 200, 80 kV 300, 200, 120, 80 kV 200, 80, 60 kV 300, 200, 60, 30 kV
    EDS Solid angle 0.26srad Dual Type (2×158mm2) Dual Type (Solid angle 1.96srad=2×0.98srad) Ultra-X (Max. 4.45srad)
    EELS GATAN Enfinium GATAN ContinuumER GATAN Quantum Gatan Continuum S
    RMKS Electron holography / Tomography ASTAR Precession Diffraction Electron holography / Tomography 16-segmented STEM detector (BF/DF/HAADF) / DPC / iDPC / Tomography
    　　　 　　　 　　　 　　　 　　　 　　　 　　　
    System Talos F200X G2
    (Thermo Fisher Scientific)    		 JEM-2800
    (JEOL)    		 JEM-2100F1
    (JEOL)    		 JEM-2100F2
    (JEOL)
    Photo
    Place Namiki-site
    WPI-MANA Bldg. #W-102    		 Sengen-site
    Advanced Structural Materials Bldg. #115    		 Sengen-site
    Physical Analysis Lab. #126    		 Sengen-site
    Physical Analysis Lab. #117
    ARIM N/A N/A ○ (ARIM page) ○ (ARIM page)
    NOF N/A ○ (NOF page) ○ (NOF page) ○ (NOF page)
    Internal ○ ○ ○ ○
    Accel. Voltage 200, 80 kV 200 kV 200, 120, 100 kV 200 kV
    EDS Super-X Dual Type (2×100mm2) Spot analysis and Elemental mapping Spot analysis and Elemental mapping
    EELS - GATAN QuantumER GATAN Enfina GATAN Enfina
    RMKS Tomography ASTAR Precession Diffraction STEM: ADF and BF / Tomography STEM: ADF and BF / Tomography
    　　　 　　　 　　　 　　　 　　　 　　　 　　　
    System JEM-2100
    (JEOL)
    Photo
    Place Sengen-site
    Physical Analysis Lab. #119
    ARIM ○ (ARIM page)
    NOF ○ (NOF page)
    Internal ○
    Accel. Voltage 200, 160, 120, 100, 80 kV
    EDS Spot analysis
    EELS -
    RMKS -
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    Atom Probe Tomography (APT)

     Only technique that can visualize the three-dimensional distribution of atoms in materials. 　　　 　　　 　　　
    System Invizo6000  NEW 
    (CAMECA)
    Photo
    Overview DUV laser-assisted Atom Probe
    Place Sengen-site
    Central Bldg. #531
    ARIM ×
    NOF ×
    Internal ○
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    FIB (Focused Ion Beam) / SEM (Scanning Electron Microscope)

     TEM samples preparation by FIB (or FIB-SEM) systems, or SEM analyses. 　　　 　　　 　　　
    System Helios 650
    (Thermo Fisher Scientific)    		 NB5000
    (Hitachi High-Tech)    		 JIB-4000
    (JEOL)    		 JEM-9320FIB
    (JEOL)    		 JEM-9310FIB
    (JEOL)
    Photo
    FIB-SEM dual beam
    FIB-SEM dual beam
    FIB system
    FIB system
    FIB system
    Place Sengen-site
    Physical Analysis Lab. #129    		 Sengen-site
    Physical Analysis Lab. #129    		 Sengen-site
    Physical Analysis Lab. #115    		 Sengen-site
    Physical Analysis Lab. #115    		 Sengen-site
    Physical Analysis Lab. #212
    ARIM ○ (ARIM page) ○ (ARIM page) ○ (ARIM page) ○ (ARIM page) ○ (ARIM page)
    NOF ○ (NOF page) ○ (NOF page) ○ (NOF page) ○ (NOF page) ○ (NOF page)
    Internal ○ ○ ○ ○ ○
    　　　 　　　 　　　
    System JSM-7000F
    (JEOL)    		 Scios2
    (Thermo Fisher Scientific)    		 AurigaLaser
    (CarlZeiss)    		 SMF-1000
    (Hitachi High-Tech)    		 JSM-7900F
    (JEOL)
    Photo
    SEM system
    FIB-SEM dual beam
    FIB-SEM-Laser
    FIB-SEM-Ar beam
    SEM system
    Place Sengen-site
    Physical Analysis Lab. #212    		 Sengen-site
    Advanced Structural Materials Bldg. #108    		 Sengen-site
    Advanced Structural Materials Bldg. #109    		 Sengen-site
    Advanced Structural Materials Bldg. #109    		 Sengen-site
    Advanced Structural Materials Bldg. #208
    ARIM ○ (ARIM page) N/A N/A ○ (ARIM page) N/A
    NOF ○ (NOF page) ○ (NOF page) ○ (NOF page) ○ (NOF page) ○ (NOF page)
    Internal ○ ○ ○ ○ ○
    　　　 　　　 　　　
    System Ethos NX5000
    (Hitachi High-Tech)    		 TM4000PlusII
    (Hitachi High-Tech)
    Photo
    FIB-SEM dual beam
    SEM system
    Place Namiki-site
    Quake-Free Lab. #107    		 Namiki-site
    High Voltage Electron Microscope Lab. #110
    ARIM ○ (ARIM page) ○ (ARIM page)
    NOF ○ (NOF page) ○ (NOF page)
    Internal ○ ○
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    Specialized Holders

    Holder Model 636 (Gatan) Lightning (DENSsolutions) Model 652 (Gatan) EM-21311HTR (JEOL)
    Photo
    Type Double-tilt LN2 cryo TEM holder Double-tilt bias and heating TEM holder Double tilt heating holder High-tilt specimen retainer
    Place Sengen-site
    Physical Analysis Lab. #128    		 Sengen-site
    Physical Analysis Lab. #128    		 Sengen-site
    Physical Analysis Lab. #128    		 Sengen-site
    Physical Analysis Lab. #128
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    Other equipments for TEM/SEM samples preparation

     Sengen-site (Usage Guideline of Sample Preparation Room, #103, Physical Analysis Lab. Bldg., Sengen )

  • ISOMET Low Speed Saw (Buehler)
  • Model 691 PIPS (Gatan)
  • Multiprep System (Allied)
  • Model 656 Dimple Grinder (Gatan)
  • EM-09100IS (JEOL)
  • Model 695 PIPS II (Gatan)
  • EM UC6 (Leica)
  • Pick-up System
  • Carbon coater JEC -560 (JEOL)
  • Osmium coater NL-OPC80A, HPC-1SW
  • Platinum coater JFC-1600 (JEOL)
  • Au coater JFC-1500
  • High clean vacuum coater SVC-700
  • Ultrasonic Disc Cutter Model 601
  • Model 682 (Gatan)
    •  * Please bring your own target materials for evaporation source.

     Namiki-site

  • Model 1040 Nanomill (Fischione)
  • Model 695 PIPS II (Gatan)
  • Model 656 Dimple Grinder (Gatan)
  • VES-30T
  • ML-180 DoctorLap
  • MS2 MICROSAW (TECHNOORG-LINDA)
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    Analyses Programs

    Program HRTEM Analysis System Electron Tomography Analysis System DPC analysis System
    Photo
    Overview A program for making crystal model and simulation of high resolution image and diffraction pattern. A program for tomography analysis. A program for analysis of electric and magnetic fields by 4D-STEM.
    Place Sengen-site
    Physical Analysis Lab. #106    		 Sengen-site
    Physical Analysis Lab. #106    		 Sengen-site
    Physical Analysis Lab. #106
    RMKS * N/A for ARIM * N/A for ARIM
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