Specifications | |
---|---|
Ion Source | Ga liquid-metal source |
Acc. Voltage | 5 to 30 kV (5 kV step variable) |
Resolution | 8nm (30 kV) |
Max. Current | 10 nA (30 kV) |
Magnification | ×150~300,000 (LOW MAG ×50) |
Attachments | Protection layer deposition (Carbon) Sample holders : TEM-compatible holder FIB bulk-specimen holder Max:20×20×20(thickness)mm Bulk-sample holder (Max:8×8×1(thickness)mm) |