FIB加工装置
Focused Ion Beam System
JEM-9320FIB (JEOL)
FIB（集束イオンビーム）でバルク試料からTEM薄膜試料片を直接製作する装置です。サブミクロン精度で興味のある場所のTEM試料作製が出来ます。FIB内で加工・分離をした試料片をピックアップシステムによりメッシュ上へ接着することも可能です。
* ピックアップシステムが必要な方はそちらもお選びください。
This is a Focused Ion Beam (FIB) system, which is used to prepare cross-sectional samples for TEM and SEM from the specific area on the bulk specimen. Using the Pick-up system, it is also possible to pick up the processed sample and attach it on a TEM mesh.
* Please kindly choose Pick-up System if necessary.
| Specifications | |
|---|---|
| Ion Source | Ga liquid-metal source |
| Acc. Voltage | 5 to 30 kV (5 kV step variable) |
| Magnification | ×150 to ×300,000 (LOW MAG ×50) |
| Max. Current | 30 nA |
| Best image resolution | 6 nm (@30 kV, WD 30nm) |
| Tilt angle | ±60° |
| Sample movement | X Y ±1.2mm |
| Attachments | Protection layer deposition (Carbon) Sample holders : TEM-compatible holder Bulk-sample holder (Max:8×8×1(thickness)mm) |
| Images |  |
