施設・装置Facilities
FIB 加工装置 (JIB-4000) Focused Ion Beam Systems
[設置部屋] 千現地区 精密計測実験棟115室/Location: Room115, Physical Analysis Laboratories Building
[メーカー] 日本電子/Maker: JEOL Ltd.
FIB（集束イオンビーム）でバルク試料からTEM薄膜試料片を直接製作する装置です。サブミクロン精度で興味のある場所のTEM試料作製が出来ます。FIB内で加工・分離をした試料片をピックアップシステムによりメッシュ上へ接着することも可能です。
*ピックアップシステムが必要な方はそちらもお選びください
This is a Focused Ion Beam (FIB) system, which is used to prepare cross-sectional samples for TEM and SEM from the specific area on the bulk specimen. Using the Pick-up system, it is also possible to pick up the processed sample and attach it on a TEM mesh.
* Please kindly choose Pick-up System if necessary.
| Specifications | |
|---|---|
| Ion Source | Ga liquid-metal source |
| Acc. Voltage | 1 to 30 kV (5kV step variable) |
| Magnification | ×200 to ×300,000 (LOW MAG ×60) |
| SMax.Current | 60nA (@30kV) |
| Best image resolution | 5nm (@30kV) |
| Tilt angle | ・-5~+60° (Bulk-specimen 5 axis goniometer stage) ・±60° (Side entry goniometer stage) |
| Sample movement | ・X ±11mm, Y ±15mm (Bulk-specimen 5 axis goniometer stage) ・X Y ±1.2mm (Side entry goniometer stage) |
| Attachments | |
| Protection layer deposition (Carbon) | |
| Sample holders |
・Bulk-specimen holder (Bulk-specimen 5 axis goniometer stage) (Max: 28mm dia. ×7.5mm(thickness)) ・Bulk-specimen holder (Side entry goniometer stage) (Max: 8×8×1(thickness) mm) ・TEM-compatible holder (Tip-on holder) ・Stage Navigation System |