NIMS Microstructural Characterization Platform
for advanced nanomaterials, office
E-mail:nmcp[at]nims.go.jp (Replace [at] by @)

3D imaging

SMF-1000
Versatile triple-beam scanning electron microscope
SEM and FIB columns are arranged orthogonally to realize high resolution a high contrast SEM observations.
High quality 3D reconstruction observation by a serial sectioning, STEM observation, compositional mapping by EDS, orientation mapping by EBSD etc.
can be done within this single equipment.

(Room 109, Advanced Structural Materials Research Building at Sengen)

SMX-160CTS
High resolution X-ray CT device with micro X-ray source (0.4 μm)
High speed algorisms for three dimensional computed tomography.
High transmittance with the maximum output of 160kV, a few centimeters for light metals.