3D imaging
- SMF-1000
Versatile triple-beam scanning electron microscope SEM and FIB columns are arranged orthogonally to realize high resolution a high contrast SEM observations.
High quality 3D reconstruction observation by a serial sectioning, STEM observation, compositional mapping by EDS, orientation mapping by EBSD etc.
can be done within this single equipment.
(Room 109, Advanced Structural Materials Research Building at Sengen)
- SMX－160CTS
High resolution X-ray CT device with micro X-ray source (0.4 μm) High speed algorisms for three dimensional computed tomography.
High transmittance with the maximum output of 160kV, a few centimeters for light metals.