NIMS Microstructural Characterization Platform
for advanced nanomaterials, office
E-mail:nmcp[at] (Replace [at] by @)

3D imaging

Versatile triple-beam scanning electron microscope
SEM and FIB columns are arranged orthogonally to realize high resolution a high contrast SEM observations.
High quality 3D reconstruction observation by a serial sectioning, STEM observation, compositional mapping by EDS, orientation mapping by EBSD etc.
can be done within this single equipment.

(Room 109, Advanced Structural Materials Research Building at Sengen)

High resolution X-ray CT device with micro X-ray source (0.4 μm)
High speed algorisms for three dimensional computed tomography.
High transmittance with the maximum output of 160kV, a few centimeters for light metals.