NIMS Microstructural Characterization Platform
for advanced nanomaterials, office
E-mail:nmcp[at]nims.go.jp (Replace [at] by @)

He lon Microscope





Scanning helium ion microscope
(ORION Plus)
Out of order(2021.8.25)
This is the most advanced scanning helium ion microscope (SHIM) with a very high spatial resolution of sub-nanometer scale. The SHIM has relatively small diffraction and charging effects, large depth-of-focus, and low irradiation imaging but also high resolution nanoscale lithography using the highly focused ion beam. Gas Injection System for ion beam induced deposition was added in 2014.

(Room 116, Materials Reliability Laboratories at Sengen)