詳細を閉じる
(千現地区 先進構造材料研究棟 109号室)
Specifications
Versatile triple-beam scanning electron microscope (SEM, FIB and Ar ion ).
SEM and FIB columns are arranged orthogonally to realize high resolution and high contrast SEM observations.
By high-performance FIB, serial-sectioning observations and subsequent 3D image reconstruction can be done.
This microscope enable various microstructural observations with high resolution/contrast throughout a wide range of magnification.
High quality 3D observation, STEM observation, EDS mapping, EBSD etc. can be performed with this single equipment.