Atom Probe Tomography Unit

Cutting-edge Nanostructure Analysis using Atom Probe Tomography (APT)

APT

Atom probe tomography (APT, or 3DAP; three-dimentional atom probe) is the only method to visualize the distribution of atoms as 3D map at a magnification ratio of over 1 million by simultaneously measuring the mass and position of atoms ionized with laser pulses (or voltage pulses) from the needle-shaped specimens with the radius of curvature ~ 50 nm. For example, this method can precisely analyze the 3D distribution of elements within nanoscale devices or the uneven elemental distributions within materials.

APT
×TEM

Our unit focuses on the APT method, performing complementary analysis combined with transmission electron microscopy (TEM) while collaborating with Electron Microscopy Unit. This allows us to provide sophisticated and advanced nanostructure analysis. We also provide comprehensive technical support from scanning electron microscopy (SEM) observation to APT specimens preparation by using focused ion beam (FIB).