Atom Probe Tomography Unit | NIMS

Equipments

Invizo6000

Deep UV Laser-Assisted 3D atom probe

See the details

LEAP5000XS

Local Electrode UV-laser-assisted Atom Probe

See the details

HeliosG4UX

FIB-SEM Dualbeam System

See the details

Specification Comparison of APT Systems at NIMS, and the Others

Invizo6000
(AMETEK)		 LEAP5000XS
(AMETEK)		 Laser-assisted-APT developed by NIMS LEAP6000XR
(AMETEK)		 LEAP5000XR
(AMETEK)
Photo * Not at NIMS * Not at NIMS
Flight Path Straight Straight Straight Reflectron Reflectron
Detection Efficiency ~ 62 % ~ 80 % 30 ~ 40 % ~ 50 % ~ 50 %
Laser System 257.5 nm 355 nm 1030, 515, 343, 257.5 nm 257.5 nm 355 nm
Features
  • New ion flight path design achieves an analysis field of view over four times larger compared to conventional ones.
  • Improved APT data quality with DUV laser.
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  • TEM/APT analysis on the same ROI is possible.
  • APT specimens can be transported without air exposure and at low temperatures (approximately -150°C).
  • Improved detection efficiency up to ~ 80%
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  • The laser wavelength is tunable, and by employing a UV laser, NIMS achieved the world's first APT analysis of bulk insulating materials.
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  • Pursuing mass resolution through synchronization of DUV laser pulse and voltage pulse.
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  • Pursuing mass resolution through reflectron flight path.
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