Local Electrode UV-laser-assisted Atom Probe
LEAP5000XS (AMETEK)
Sengen-site, Central Bldg. #537
The atom probe tomography (APT) method is the only method to visualize the distribution of atoms as 3D tomography at a magnification ratio of over 1 million by simultaneously measuring the mass and position of atoms ionized with lasers from the tip of a needle-shaped sample. For example, this method can precisely analyze the distribution of elements within a nanoscale device or the uneven distribution of nanoscale elements within a material. While even the latest transmission electron microscope (TEM) has difficulty in quantitatively analyzing light elements segregating to a defect, the APT makes it possible to directly observe elements segregating to a defect on the atomic plane or a one-dimensional defect within a crystal called dislocation. The "LEAP5000XS" is straight flight path with 355nm UV laser pulsing atom probe system. Transferring APT samples between cryo-FIB-SEM and APT kept at low temperature and without air exposure is possible by using VCTM (Vacuum and Cryo Transfer Module).
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