Deep UV Laser-Assisted 3D atom probe
Invizo6000 (AMETEK)
Sengen-site, Central Bldg. #531
Atom probe tomography (APT, or 3DAP; three-dimentional atom probe) is the only technique that can visualize the three-dimensional distribution of atoms in materials with nearly atomic spatial resolution and high chemical sensitivity. The "Invizo6000" has an ultra wide field of view owing to new designed flight path and dual-beam deep UV laser pulse system, allowing in a greater analysis volume.
| Laser System | |
|---|---|
| Flight Path |
[NF0273] Deep UV Laser-Assisted 3D Atom Probe (Invizo6000)
- External Use: https://nims-open-facility.nims.go.jp/facility.php?mode=detail&code=360
- NIMS Internal Use: http://awayame.nims.go.jp/facility.php?mode=detail&code=579(* accessible only from the NIMS internal network.)