Atom Probe Tomography Unit | NIMS

FIB-SEM Dualbeam System
HeliosG4UX (Thermo Fisher Scientific)

Sengen-site, Central Bldg. #537

Focused Ion Beam (FIB) and Scanning Electron Microscope (SEM) system (FIB-SEM dual beam). In addition to SEM observation using various detectors, it enables the preparation of atom probe tomography/TEM specimens from specific regions using FIB millling by standard lift-out method.

Specifications
FIB (Ga)
  • Accelerating voltage range: 500 V ~ 30 kV
  • Ion beam current range: 0.1 pA ~ 65 nA
    		•
    SEM
  • Everhart-Thornley SE detector (ETD)
  • Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)
  • High performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE)