Some of major facilities are shown here. For further information, please see the following webpage.
  • Major Facilities of Research Center for Magnetic and Spintronic Materials (CMSM)

  • Deposition systems
    Ultrahigh vacuum sputtering cluster Ultrahigh vacuum sputtering Thermal evaporation
    Deposition systems
    Microfabrication Equipments
    Electron beam lithography Mask aligner (1) Mask aligner (2)
    Microfabrication Equipments
    Ar ion milling
    Characterization tools
    Vibrating sample magnetometry SQUID-VSM High field Micro-Kerr
    Characterization tools
    Scanning electron microscopy PPMS CIPT
    Characterization tools
    Electromagnet High frequency prober



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