Deposition systems | ||
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Ultrahigh vacuum sputtering cluster | Ultrahigh vacuum sputtering | Thermal evaporation |
Deposition systems |
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Sputtering |
Microfabrication Equipments | ||
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Electron beam lithography | Mask aligner (1) | Mask aligner (2) |
Microfabrication Equipments |
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Ar ion milling |
Characterization tools | ||
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Vibrating sample magnetometry | SQUID-VSM | High field Micro-Kerr |
Characterization tools | ||
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Scanning electron microscopy | PPMS | CIPT |
Characterization tools | |
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Electromagnet | High frequency prober |