Some of major facilities are shown here. For further information, please see the following webpage.
Major Facilities of Research Center for Magnetic and Spintronic Materials (CMSM)
| Deposition systems | ||
|---|---|---|
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| Ultrahigh vacuum sputtering cluster | Ultrahigh vacuum sputtering | Thermal evaporation |
| Deposition systems |
|---|
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| Sputtering |
| Microfabrication Equipments | ||
|---|---|---|
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| Electron beam lithography | Mask aligner (1) | Mask aligner (2) |
| Microfabrication Equipments |
|---|
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| Ar ion milling |
| Characterization tools | ||
|---|---|---|
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| Vibrating sample magnetometry | SQUID-VSM | High field Micro-Kerr |
| Characterization tools | ||
|---|---|---|
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| Scanning electron microscopy | PPMS | CIPT |
| Characterization tools | |
|---|---|
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| Electromagnet | High frequency prober |
