(”Realization of closed-loop optimization of epitaxial titanium nitride thin-film growth via machine learning”
Isao Ohkubo (NIMS), Zhufeng Hou (NIMS), Jiyeon N. Lee (University of Tokyo),
Takashi Aizawa (NIMS), Mikk Lippmaa (University of Tokyo),
Toyohiro Chikyow (NIMS),
Koji Tsuda (University of Tokyo, NIMS), and
Takao Mori (NIMS); Journal: Materials Today Physics [September 28, 2020]; DOI :
10.1016/j.mtphys.2020.100296)