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6-axis diffractometer for structural analysis of functional thin films

The six-axis diffractometer for structural analysis of functional thin films owned by the Hyogo prefecture is installed in the 1st experimental hutch, based on the collaborative research with the Hyogo Science and Technology Association. Diffraction data from a crystalline thin film will be collected in a wide reciprocal-lattice space using the six-axis diffractometer. In-plane and out-of-plane configurations are typically used. A three dimensional atomic arrangement will be analyzed; in addition, surface and interface micrometer roughness, lattice strain depth profile of its density, and so on are obtained. A pin detector as well as a slit system enables a high angular-resolution measurement. An incident photo energy range of 10 to 20 keV is recommended and the energy is available up to 36 keV. The diffractometer used has four degrees of freedom for sample rotation and two degrees of freedom for detector rotation. The distributed beamtime for one experiment is 6 shifts on average.

6-axis diffractometer for structural analysis of functional thin films



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