実動環境対応物理分析電子顕微鏡
Real Working Environment Physical Characterization TEM

JEM-ARM200F-G (JEOL)

千現地区 材料信頼性実験棟 118室 / Sengen-site, Materials Reliability Lab. #118

照射レンズ系、結像レンズ系のそれぞれに収差補正機能を搭載し、超高分解能を実現すると共に、様々な実動作環境におけるその場観察・分析・ポテンシャル計測を可能にした透過形電子顕微鏡です。

This microscope has TEM image and STEM probe aberration correctors for high-resolution observations. Furthermore, it enables us to do in-situ observation, chemical analysis and potential measurement under various conditions by utilizing special specimen holders.

Specifications
Acc. Voltage	200kV, 80kV
Resolution	Point 0.11 nm / Lattice 0.07 nm (TEM mode) 0.08nm (STEM mode)
Sample Tilting Angle	X / Y=±35° / ±30°
Observation/Analysis Functions	EELS analysis: GATAN Enfinium (200kV, 80kV) EDS:SDD Type (Detection surface area 30mm2; Solid angle 0.26sr) Electron holography: Wave-front separation holography by use of electron biprism 3D: TEM/STEM computed tomography
Images	(HRTEM image of YSZ@1000deg.)