The NIMS and CAMECA Business Unit of AMETEK Co., Ltd. (hereafter, "CAMECA") established CAMECA-NIMS 3DAP Laboratory for educational and awareness activities for 3D atom probe technology, which can analyze the distribution of elements forming a material as 3D tomography at single-atom resolution.
Abstract
(3D atom probe developed by NIMS)
NIMS has played a leading role in this area; for example, it has developed
an original laser atom probe and was the first in the world to succeed in atom probe analysis of bulk insulators using an ultraviolet laser. CAMECA is contributing to the development and global popularization of this method as the only manufacturer of commercial 3D atom probe devices at present. To date, this device has been installed in 71 research institutes and universities around the world and is used to analyze a variety of materials, 99% of which have been sold by CAMECA, marking exclusive results. There are nine research institutes and businesses using this device in Japan.
(3D tomography of Nd-Fe-B magnet)
The 3D atom probe method is the only method to visualize the distribution of atoms as 3D tomography at a magnification ratio of over 1 million by simultaneously measuring the mass and position of atoms ionized with lasers from the tip of a needle-shaped sample. For example, this method can precisely analyze the distribution of elements within a nanoscale device or the uneven distribution of nanoscale elements within a material. While even the latest transmission electron microscope (TEM) has difficulty in quantitatively analyzing light elements segregating to a defect, the 3D atom probe makes it possible to directly observe elements segregating to a defect on the atomic plane or a one-dimensional defect within a crystal called dislocation. However, the atom probe has not become very popular among science and engineering faculties at Japanese universities because it requires special expertise and its devices are expensive. There have been serious barriers to the introduction and use of those devices at universities and businesses because there are extremely limited opportunities to learn sample preparation, measurement methods, and analysis method expertise.
(CAMECA-NIMS 3DAP Lab. Kick-off Meeting)
In FY2017, NIMS introduced CAMECA’s state-of-the-art commercial atom probe (LEAP-5000 XS), which can perform ionization with ultraviolet radiation lasers. Also, the 3D atom probe (EIKOS-X), which was developed as a popular model by CAMECA, will be installed at NIMS, and a joint lab will be established with NIMS to make it available to external users. This EIKOS-X will be launched at the same time as the Lab, and it will be offered through the EIKOS Consortium (Representative: Songsu Cho, CAMECA Business Unit Manager, AMETEK Co., Ltd.) in exchange for a cooperation fee depending on the occupancy of the device, even if the study’s analysis results will not be released.
CAMECA-NIMS 3DAP Laboratory will provide regular lectures on the 3D atom probe method and technical instruction by dedicated operators for sample preparation, measurement and analysis. When samples must be prepared at the Lab, the FIB/SEM device (FEI Helios G4) of NIMS can be used. This allows even researchers at businesses or educational/research institutes who have not used a 3D atom probe to use the 3D atom probe analysis method for material study.
