Inside the clean room, the participants experienced two kinds of photolithography including a “positive-type process” and a “negative-type process” to learn about semiconductor manufacturing. To observe the difference between the two types of processes, the participants checked and compared the results under the microscope.

Then they used photolithography to make two types of Au-electrode wires with and without dust to verify the sensitivity to environmental contamination. By I-V measurements and SEM observation of the electrode structure, the participants learned that even a single nano-scale dust can cause short-circuit in an electrode, which is the reason why semiconductor processing needs an environment with a controlled level of contamination.