FY2025 Equipment
Bioanalysis Unit
High Magnetic Field Characterization Unit
Surface and Bulk Analysis Unit
Electron Microscopy Unit
Nanofabrication Unit
High Magnetic Field Characterization Unit
Surface and Bulk Analysis Unit
Electron Microscopy Unit
Nanofabrication Unit
Bioanalysis Unit
| ID | Equipment | Place |
| NM-001 | NMR（ECS-400） | Sengen-site / Materials Reliability Lab. 205 |
| NM-002 | LC-MS（Q-Exactive Plus） | Sengen-site / Materials Reliability Lab. 205 |
| NM-020 | LC-MS（Orbitrap Exploris 480） | Sengen-site / Materials Reliability Lab. 205 |
| NM-003 | Raman microscope（inVia Reflex） | Sengen-site / Materials Reliability Lab. 202 |
| NM-004 | Confocal laser scanning fluorescence microscope（SP5） | Sengen-site / Materials Reliability Lab. 202 |
| NM-005 | Atomic force microscope （AFM） in liquid（NanoWizard 4 XP） | Sengen-site / Materials Reliability Lab. 202 |
| NM-006 | Tabletop scanning electron microscope （SEM）（TM4000PlusII, TM3000） | Sengen-site / Materials Reliability Lab. 202 |
| NM-007 | Surface plasmon resonance （SPR） instrument（Biacore X100） | Sengen-site / Materials Reliability Lab. 202 |
| NM-008 | Plate reader（EnSight） | Sengen-site / Materials Reliability Lab. 202 |
| NM-009 | Spectrophotometer（U-2900） | Sengen-site / Materials Reliability Lab. 202 |
| NM-010 | Fluorescence spectrophotometer（F-7000） | Sengen-site / Materials Reliability Lab. 202 |
| NM-011 | FT-IR（IRTracer-100） | Sengen-site / Materials Reliability Lab. 205 |
| NM-012 | Circular dichroism （CD）（J-725） | Sengen-site / Materials Reliability Lab. 205 |
| NM-013 | Zeta potential analyzer（ELSZ-1000Z） | Sengen-site / Materials Reliability Lab. 205 |
| NM-014 | Dynamic light scattering （DLS） spectrophotometer（DLS-8000HAL） | Sengen-site / Materials Reliability Lab. 205 |
| NM-015 | Particle size analyzer（SALD-2100） | Sengen-site / Materials Reliability Lab. 205 |
| NM-016 | Contact angle meter（VCA Optima-XE） | Sengen-site / Materials Reliability Lab. 205 |
| NM-017 | Texture analyzer（TA-XT2i） | Sengen-site / Materials Reliability Lab. 205 |
| NM-018 | HPLC with MS（Prominence, LXQ） | Sengen-site / Materials Reliability Lab. 205 |
| NM-019 | Gel permeation chromatography （GPC）（Nexera40, DAWN 8, GPC-101） | Sengen-site / Materials Reliability Lab. 205 |
High Magnetic Field Characterization Unit
| ID | Equipment | Place |
| NM-101 | 500 MHz Solid-State NMR （1）（JNM-ECZ500R） | Sakura-site / The 2nd NMR Lab. 107 |
| NM-102 | 500 MHz Solid-State NMR （Ⅱ）（JNM-ECZ500R） | Sakura-site / The 2nd NMR Lab. 108 |
| NM-103 | 800 MHz Solid-State high-resolution NMR（JNM-ECA800 ） | Sakura-site / The 2nd NMR Lab. 109 |
Surface and Bulk Analysis Unit
| ID | Equipment | Place |
| NM-201 | Single Crystal X-ray Diffractometer for Multiple Environments（XtaLAB Synergy-R/DW Custom） | Namiki-site / Main Research Bldg. 317 |
| NM-209 | sXRD_R_DW_LT_Pilatus_NSC（VariMax DW AFC11 with Pilatus） | Namiki-site / Main Research Bldg. 320 |
| NM-204 | pXRD_ Multi_Cu_R_SSL（SmartLab 9 kW） | Sengen-site / Materials Evaluation Lab. 212 |
| NM-210 | pXRD_LT/HT_Cu1_R_NTS（SmartLab 9 kW with cryostat/furnace） | Namiki-site / Main Research Bldg. 317 |
| NM-211 | pXRD_Cu_ASC_NS3 （SmartLab3） | Namiki-site / Main Research Bldg. 320 |
| NM-212 | pXRD_Cu_ASC_NC1 （MiniFlex600_Cu） | Namiki-site / Main Research Bldg. 322 |
| NM-213 | pXRD_Cu_ASC_NC2 （MiniFlex600_Cu） | Namiki-site / Main Research Bldg. 322 |
| NM-214 | pXRD_Cr_SCR （MiniFlex600_Cr） | Sengen-site / Materials Evaluation Lab. 214 |
| NM-215 | pXRD_Cu_SMF （MiniFlex600_Cu） | Sengen-site / Materials Evaluation Lab. 214 |
| NM-216 | TF-XRD_Cu（SmartLab） | Namiki-site / MANA Bldg. 401 |
| NM-228 | Micro Energy Dispersive X-ray Fluorescence Spectrometer（Micro-EDXRF) | Sengen-site / Fine Processing Lab. 313 |
| NM-202 | Dual Scanning X-ray Photoelectron Microprobe Equipped with Hard X-Ray（HAX-PES/XPS）（Quantes） | Namiki-site / MANA Bldg. 403 |
| NM-225 | XPS （Quantera SXM） | Sengen-site / Physical Analysis Lab. 124 |
| NM-203 | Inductively Coupled Plasma Optical Emission Spectrometers / Inductively Coupled Plasma Mass Spectrometers（1. 720 ICP-OES, 2. Agilent5800, 3. Agilent7850, 4. SPS3520DD-UV, 5. Element XR, 6. Agilent5800） | Sengen-site / Fine Processing Lab. 317, 319/Namiki-site /Main Research Bldg. 311 |
| NM-230 | Glow Discharge Mass Spectrometer (GD-MS) | Sengen-site / Fine Processing Lab. 311 |
| NM-205 | Time-of-flight Secondary Ion Mass Spectrometry （TOF-SIMS）（PHI TRIFT V nanoTOF） | Sengen-site / Physical Analysis Lab. 123 |
| NM-229 | Ion chromatograph | Sengen-site / Fine Processing Lab. 312 |
| NM-206 | Oxygen/Nitrogen/Hydrogen Analyzer（ONH836）, Carbon/Sulfer Analyzer（CS844） | Sengen-site / Fine Processing Lab. 314 |
| NM-217 | TG/DTA＋DSC（TG/DTA 6200, X-DSC7000） | Namiki-site / MANA Bldg. 403 |
| NM-218 | Zeta-potential/Particle-size analyzer （ELSZ-2000ZS） | Namiki-site / MANA Bldg. 403 |
| NM-219 | FT-IR （IRAffinity-1s） | Namiki-site / MANA Bldg. 404 |
| NM-220 | UV-Vis-NIR （V-770） | Namiki-site / MANA Bldg. 404 |
| NM-221 | Spectrofluorometer （FP-8500DS） | Namiki-site / MANA Bldg. 404 |
| NM-222 | Spectrofluorometer （Fluorolog-3） | Namiki-site / MANA Bldg. 403 |
| NM-223 | Fourier transform infrared spectrometer （FT/IR-6700） | Sengen-site / Fine Processing Lab. 202 |
| NM-224 | Medium- and low-temperature differential thermal analyzer（DSC200F3） | Sengen-site / Fine Processing Lab. 303 |
| NM-207 | Field Emission Electron Probe Micro-Analyzer （FE-EPMA）（JXA-8500F） | Sengen-site / Physical Analysis Lab. 122 |
| NM-234 | Field Emission Electron Probe Micro Analyzer (FE-EPMA) | Sengen-site / Physical Analysis Lab. 111 |
| NM-208 | Scanning Auger Electron Microprobe （CHA Type AES）（JAMP-9500F） | Sengen-site / Physical Analysis Lab. 111 |
| NM-226 | Schottky FE-SEM （JSM-7001F） | Sengen-site / Physical Analysis Lab. 112 |
| NM-227 | FE-SEM （SU-8000） | Sengen-site / Physical Analysis Lab. 114 |
| NM-231 | Field Emission Scanning Electron Microscope (JSM-6500F) | Sengen-site / Physical Analysis Lab. 113 |
| NM-232 | Scanning Electron Mocroscope（JSM-6510） | Sengen-site / Physical Analysis Lab. 112 |
| NM-233 | Laser-Based Elemental Analyzer | Sengen-site / Fine Processing Lab. 313 |
Electron Microscopy Unit
| ID | Equipment | Place |
| NM-403 | FIB-SEM combined apparatus for automatic preparation of TEM specimens（NX5000） | Namiki-site / Quake-Free Lab. 107 |
| NM-404 | Damage-less TEM specimen milling apparatus（Model 1040 Nanomill） | Namiki-site / High Voltage Electron Microscope Lab. 102 |
| NM-407 | Ceramics sample preparation facilities | Namiki-site / High Voltage Electron Microscope Lab. 110 |
| NM-501 | Real working environment physical characterization TEM（JEM-ARM200F-G） | Sengen-site / Materials Reliability Lab. 118 |
| NM-502 | Real working environmental electron holography microscope（JEM-ARM200F-B） | Sengen-site / Fine Processing Lab. 125 |
| NM-503 | 200kV field emission transmission electron microscope（JEM-2100F1） | Sengen-site / Physical Analysis Lab. 126 |
| NM-504 | 200kV field emission transmission electron microscope（JEM-2100F2） | Sengen-site / Physical Analysis Lab. 117 |
| NM-505 | 200kV transmission electron microscope（JEM-2100） | Sengen-site / Physical Analysis Lab. 119 |
| NM-506 | Double-tilt bias and heating TEM holder（Lightning） | Sengen-site / Physical Analysis Lab. 106 |
| NM-507 | Double-tilt LN2 cryo TEM holder（Gatan 636） | Sengen-site / Physical Analysis Lab. 106 |
| NM-508 | Field emission scanning electron microscope | Sengen-site / Physical Analysis Lab. 212 |
| NM-302 | Orthogonal FIB-SEM(SMF-1000) | Sengen-site / Advanced Structural Materials Bldg. 109 |
| NM-517 | FIB/SEM microfabrication instrument(Helios 650) | Sengen-site / Physical Analysis Lab. 129 |
| NM-509 | Dual Beam system（NB5000） | Sengen-site / Physical Analysis Lab. 129 |
| NM-510 | Focused Ion Beam system（JIB-4000） | Sengen-site / Physical Analysis Lab. 115 |
| NM-511 | Focused Ion Beam system（JEM-9320FIB） | Sengen-site / Physical Analysis Lab. 115 |
| NM-512 | Focused Ion Beam system（JEM-9310FIB） | Sengen-site / Physical Analysis Lab. 212 |
| NM-513 | Pick-up System | Sengen-site / Physical Analysis Lab. 115 |
| NM-514 | Ultramicrotome（Leica EM UC6） | Sengen-site / Physical Analysis Lab. 212 |
| NM-515 | Electron tomography analysis system | Sengen-site / Physical Analysis Lab. 105 |
| NM-516 | TEM sample preparation apparatus | Sengen-site / Physical Analysis Lab. 103, 108 |
Nanofabrication Unit
| ID | Equipment | Place |
| NM-661 | EB Lithography [JBX-8100FS] | Sengen-site / Materials Reliability Lab. 119 |
| NM-635 | EB Lithography [ELS-BODEN100] | Namiki-site / MANA Bldg. 503 |
| NM-603 | Laser Lithography [DWL66+] | Sengen-site / Materials Reliability Lab. |
| NM-636 | Maskless Lithography [DL-1000] | Namiki-site / MANA Bldg. 503 |
| NM-604 | Maskless Lithography [DL-1000/NC2P] | Sengen-site / Materials Reliability Lab. |
| NM-660 | Maskless Lithography [MLA150] | Sengen-site / Materials Reliability Lab. 102 |
| NM-670 | Automatic Developer [AD-1200] | Sengen-site / Materials Reliability Lab. 102 |
| NM-605 | H2O Plasma Cleaner [AQ-500 #1] | Sengen-site / Materials Reliability Lab. |
| NM-638 | H2O Plasma Cleaner [AQ-500 #2] | Namiki-site / MANA Bldg. 502 |
| NM-606 | UV Ozone Cleaner [UV-1] | Sengen-site / Materials Reliability Lab. |
| NM-668 | Steam Two-Fluid Cleaning System [SSM101] | Sengen-site / Materials Reliability Lab. 102 |
| NM-608 | Sputter [JSP-8000] | Sengen-site / Materials Reliability Lab. |
| NM-641 | Sputter [CFS-4EP-LL #2] | Namiki-site / MANA Bldg. 504 |
| NM-607 | Sputter [CFS-4EP-LL #3] | Sengen-site / Materials Reliability Lab. |
| NM-664 | Sputter [CFS-4EP-LL #4] | Namiki-site / MANA Bldg. 504 |
| NM-610 | EB Evaporator [RDEB-1206K] | Sengen-site / Materials Reliability Lab. |
| NM-609 | EB Evaporator [ADS-E86] | Sengen-site / Materials Reliability Lab. |
| NM-665 | EB Evaporator [ADS-E810] | Namiki-site / MANA Bldg. 504 |
| NM-644 | ALD [SUNALE R-150] | Namiki-site / MANA Bldg. 503 |
| NM-611 | ALD [AD-230LP] | Sengen-site / Materials Reliability Lab. |
| NM-633 | SiO2 PECVD [PD-220NL] | Sengen-site / Materials Reliability Lab. |
| NM-612 | SiN PECVD [PD-220NL] | Sengen-site / Materials Reliability Lab. |
| NM-614 | CCP-RIE [RIE-200NL] | Namiki-site / MANA Bldg. 506 |
| NM-615 | ICP-RIE [RIE-101iPH] | Namiki-site / MANA Bldg. 506 |
| NM-617 | ICP-RIE [RV-APS-SE] | Sengen-site / Materials Reliability Lab. |
| NM-645 | ICP-RIE [CE300I] | Namiki-site / MANA Bldg. 503 |
| NM-616 | Si Deep RIE [ASE-SRE] | Sengen-site / Materials Reliability Lab. |
| NM-618 | ALE [PlasmaPro 100 ALE] | Sengen-site / Materials Reliability Lab. |
| NM-662 | ICP-RIE [Spica] | Sengen-site / Materials Reliability Lab. 102 |
| NM-619 | RTA [RTP-6 #2] | Sengen-site / Materials Reliability Lab. |
| NM-634 | RTA [RTP-6 #3] | Sengen-site / Materials Reliability Lab. |
| NM-621 | FE-SEM [S-4800] | Sengen-site / Materials Reliability Lab. |
| NM-647 | FE-SEM+EDX [S-4800] | Namiki-site / MANA Bldg. 414 |
| NM-648 | FE-SEM+EDX [SU8000] | Namiki-site / MANA Bldg. 414 |
| NM-649 | FE-SEM+EDX [SU8230] | Namiki-site / MANA Bldg. 506 |
| NM-667 | FE-SEM+EDX [JSM-IT800] | Sengen-site / Materials Reliability Lab. 116 |
| NM-650 | Tabletop SEM+EDX [TM3000] | Namiki-site / MANA Bldg. 414 |
| NM-622 | SPM [Jupiter XR] | Sengen-site / Materials Reliability Lab. |
| NM-623 | Laser Microscope [LEXT OLS4000] | Sengen-site / Materials Reliability Lab. |
| NM-626 | Surface Profilometer [Dektak XT-A #1] | Sengen-site / Materials Reliability Lab. |
| NM-666 | Surface Profilometer [Dektak XT-A #2] | Namiki-site / MANA Bldg. |
| NM-625 | Ellipsometer [MARY-102FM] | Sengen-site / Materials Reliability Lab. |
| NM-655 | Spectroscopic Ellipsometer [M2000] | Namiki-site / MANA Bldg. 505 |
| NM-663 | Spectroscopic Ellipsometer [UNECS-2000A] | Sengen-site / Materials Reliability Lab. 102 |
| NM-624 | Optical Film Mapper [F54-XY-200-UV] | Sengen-site / Materials Reliability Lab. |
| NM-628 | Thin-Film Stress Tester [FLX-2000-A] | Sengen-site / Materials Reliability Lab. |
| NM-629 | Dicing Saw [DAD322] | Sengen-site / Materials Reliability Lab. |
| NM-656 | Dicing Saw [DAD3220] | Namiki-site / MANA Bldg. 506 |
| NM-630 | Room Temp. Prober [MX-200/B] | Sengen-site / Materials Reliability Lab. |
| NM-659 | Wire Bonder [7476D #1] | Namiki-site / MANA Bldg. 513 |
| NM-632 | Wire Bonder [7476D #2] | Sengen-site / Materials Reliability Lab. |