FIB-SEM System
FIB: Focused Ion Beam (Fabricarion)
SEM: Scanning Electron Microscope (Observation)
SEM: Scanning Electron Microscope (Observation)
TEM Specimen Preparation by FIB technique
The development of the microfabrication method using the focused ion beam (FIB) technique makes site specific TEM specimen preparation possible, such as grain boundaries, interphase interfaces, specific region of devices.
3DAP tips Preparation by FIB technique
