FIB-SEM System

FIB-SEM System

FIB: Focused Ion Beam (Fabricarion)
SEM: Scanning Electron Microscope (Observation)

TEM Specimen Preparation by FIB technique

 The development of the microfabrication method using the focused ion beam (FIB) technique makes site specific TEM specimen preparation possible, such as grain boundaries, interphase interfaces, specific region of devices.

3DAP tips Preparation by FIB technique

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