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Press ReleasePress Release 2011

Successful Development of Highly Sensitive General-Purpose Sensor

-For Medical, Biological, Security, and Environmental Applications-

8 Feb, 2011

A highly sensitive novel sensor, Membrane-type Surface stress Sensor (MSS), has successfully developed. This sensor can be miniaturized and integrated with a multidimensional array and is also suitable for batch fabrication. It is expected as a versatile sensor for medical, biological, security, and environmental applications.

fig. 1

Figure 1(left): Schematic image of the measurement of various analytes ranging from gaseous to biological molecules using an array of micro-cantilevers. The deflection induced by an adsorption of analyte molecules is being detected.

fig. 2

Figure 2 (right): Newly developed Membrane-type Surface stress Sensor (MSS). The surface stress induced by an adsorption of analytes on the center membrane is efficiently detected by the piezoresistors embedded at the four peripheral beams.

Further information


Genki Yoshikawa1, Terunobu Akiyama2, Sebastian Gautsch 2, Peter Vettiger2 , Heinrich Rohrer3

  1. International Center for Materials Nanoarchitectonics (WPI-MANA), National Institute for Materials Science (NIMS)
  2. Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL)
  3. 1986 Nobel Laureate in Physics

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