Polarization microscope（−100〜420℃）

Ductless fume hood

Spin coater

Spin coater

UV Ozone Cleaner

Vaccum prober

Glovebox

Wet control actuator evaluation equipment（voltage source current measurement)

Actuator evaluation equipment（voltage source current measurement）

Ultraviolet-visible spectrophotometer（187〜900nm）

Differential scanning calorimeter（−150〜600℃）

Temperature variable X-ray diffractometer（2θ＞1°、temperature＞room temperature）

Resistance heating evaporation system

Automatic film applicator

Four-probe method low resistivity meter

Electrochemical analyzer(Impedance analyzer, Potentio-galvanostat)

Plasma sputtering system

Dynamic viscoelasticity measuring device

Fluorospectrophotometer