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Facilities, short presentation
Our laboratory disposes of equipments for the growth and the characterization of III-V nitride thin film, optical and electronics properties, metal deposition as well as equipments necessary for solar cells characterizations:
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1. Metal Organic Chemical Vapor Deposition (MOCVD) with a horizontal reactor
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For III-V nitride thin films growth, TriMethylGallium (TMG), TriMethylIndium (TMI), TriMethylAluminium (TMA) and Ammonia (NH3) are used as Ga, In, Al and N sources. It is possible to grow epitaxial thin film on different substrate sizes from 0.5cm2 to 2 inches wafer. |
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2. X-ray Diffraction (XRD) characterization
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After optimizing Π,Φ,Σ and Υ angles, XfPert Pro equipment is used for 2Π-Φ
scan and reciprocal space mappings (RSMs) with a high resolution about
1?10-4 degree. |
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3. Transmittance measurement
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An UV-3150 Shimadzu (large spectral scale from 200nm to 3200nm) is used
to measure the transmittance spectrum of grown thin films and estimate
the optical band gap. |
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4. Photoluminescence (PL) measurement
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Photoluminescence spectrum can be measured by a couple Cd-He laser + monochromator
in order to determine the optical band ga.
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. 5. E-beam evaporator
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This e-beam evaporator disposes of 3 metallic sources, titanium, gold and
nickel used for ohmic or Schottky contacts. Thicknesses deposited can be
precisely controlled at the scale of 10 nanometers under low vacuum level
about 1~2?10-7 Torr. |
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6. Transparent Conductive Organic (TCO) polymer deposition
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The TCO polymer is deposited by Mikasa spincoater MS-A100 to control efficiently the homogeneity and the films thickness. |
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7. Current-Voltage, Capacitance-Voltage characterization
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Filtered Xe lamp is used to obtain the standard AM1.5G solar spectrum. The current-voltage (I-V) is precisely measured using Keithley 2400 SourceMeter and Keithley 6487 picoammeter equipments. Capacitance-voltage characteristics are measured by Hioki 3522-50 LCR Hitester. |
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Other equipments:
- AFM
- Seebeck measurement
- ZnO MOCVD and Plasma CVD
- RHEED |
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