Focused Ion Beam

The system combines microfabrication (FIB; Focused Ion Beam) and observation (SEM; Scanning Electron Microscope) capabilities. It enables the preparation of TEM/3DAP specimens from ROIs of the samples using lift-out method with a micromanipulator. The samples fabrication technique enables nano-structural TEM/3DAP analysis of grain boundaries, phase interfaces in multi-phase structures, interfaces in multilayer films, and ROIs within devices. It also supports automated control via Python scripts and FIB milling while cooling samples to approximately -150°C.