Cs-corrected Scanning Transmission Electron Microscope (S/TEM)

Titan G2 80-200 S/TEM (FEI) can be operated at 80-200 kV. Cs correction makes electron probe much smaller, and it enables the microscope to get a higher resolution (below 0.08nm). The microscope also supports chemical analysis such as EELS (Electron Energy-Loss Spectroscopy), EDS (Energy Dispersive x-ray Spectroscopy) with atomic resolution.