Chemical sensing function composed mainly of tow factors.  One is “receptor function” that means a recognition function of a specific chemical species. The other, “ transducer function” that transducer information of chemical species to some physical signal.  In order to provide intelligence to sensor materials, we are thinking, clarifying the basics of these functions is essential. We are developing procedures of searching sensor functions, creating new thin film materials having potential of high response.  Multi sensor devices are believed to be effective to realize the intelligent sensor system.  To realize this kind of sensor system, we are synthesizing nano-particles via aqueous solution, developing patterning process of these particles.  Furthermore, sensors with carbon nano-tubes are developed.  

Doping of different elements with host materials is effective in improving the sensor function. We are developing a procedure of rapidly searching sensor materials using a combinatorial ion implantation tool that had been developed in our group. Using this equipment, wide rang doping test with wide range of additive concentration is possible form ppb to % order.

The main research field is the growth of single-crystalline thin films using molecular beams and/or ion beams generated by the Accelerator-Linked- Instrument for Synthesis and Analysis, ALISA. (see following figure)

A single-crystalline film can demonstrate the intrinsic properties. And the model system constructed with the single-crystalline films is useful for probing and understanding the interaction between the material and the surrounding environment. The process adopted here is a non-equilibrium one, which has potential for realizing novel morphology, composition, structure, etc. leading to new properties and/or materials.
Figures, which are the results obtained using the ALISA, are a RHEED pattern of the epitaxial ZnO thin film grown on ZrB2 at room temperature, a AFM topography of Pt single-crystalline grains on silica glass grown through ion-beam process, and a phase diagram at room temperature in Si-C system by ion-beam induced crystallization.

Aqueous solution processes enable us to prepare ceramics having various shapes at low temperatures.  In order to make higher sensitive and smaller ceramic gas sensor, we try to develop novel processes for semiconducting oxide ceramics such as ZnO.