Capabilities and Features
- Precise FIB milling and deposition of structures <10 nm
- Automated FIB fabrication and SEM observation via Python‑based API
- Low‑temperature FIB sample preparation (~100 K) for TEM and 3DAP samples
- Cryogenic vacuum transfer of 3DAP samples between FIB‑SEM and APT without air exposure using VCTM
- Supports EDS and EBSD analytical modes