ThermoFisher DualBeam Helios5 UX

Integrated focused ion beam and SEM platform for sample preparation and analysis

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Capabilities and Features

  • Precise FIB milling and deposition of structures <10 nm
  • Automated FIB fabrication and SEM observation via Python‑based API
  • Low‑temperature FIB sample preparation (~100 K) for TEM and 3DAP samples
  • Cryogenic vacuum transfer of 3DAP samples between FIB‑SEM and APT without air exposure using VCTM
  • Supports EDS and EBSD analytical modes
DualBeam Helios5UX system.