Carl Zeiss CrossBeam 550 Laser
FIB‑SEM system combining a high‑resolution FE‑SEM with a next‑generation focused ion beam
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Capabilities and Features
- Equipped with a femtosecond laser enabling large‑ROI milling for rapid removal of sample volumes before fine FIB work
- Ion‑Sculptor FIB (0.5–30 kV accelerating voltage; 1 pA–100 nA beam current) for precise milling and low-damage TEM lamella preparation
- 1.6 nm SEM resolution at 1 kV; ~3 nm FIB resolution at 30 kV
- Supports 3D FIB-SEM tomography via a slice‑and‑view workflow, and correlative SEM/EDS/EBSD analysis
