3D atom‑probe tomography with single‑atom detection and spatial magnification >1,000,000 by measuring both mass and position of ionized atoms
UV laser pulsing, 355 nm
Detects and identifies even light elements that are difficult to quantify via electron microscopy
Suitable for analyzing nanoscale elemental distributions, segregation to defects, and device‑level compositional profiling
Equipped with Vacuum and Cryo Transfer Module enabling transfer between FIB‑SEM and the LEAP system without air exposure and at low temperature
What is 3D Atom Probe?
A mass spectrograph that identifies atom position and processes an analyzed sample into the shape of a needle with a tip radius of around 50 nm (made by FIB-SEM usually).
It applies a laser pulse onto the sample under high voltage to ionize the atoms from the sample’s surface while simultaneously measuring the mass and position of those ions.
Because ionization is detected when it is projected from the needle onto the surface of the detector, the magnification ratio of the projection exceeds 1 million,
so the atom position can be identified at a sub-nanometer position resolution. By conducting this continuously, this method analyzes the 3D position and type of atoms evaporating sequentially from the surface of the sample.
