Shape memory alloy (SMA) is one class of actuator materials which convert thermal energy into mechanical energy. Characteristics of various actuator materials are summarized in Table 1. SMA has much larger output strain and stress compared to piezoelectric materials or magnetostrictive materials. Thus SMA is suitable as actuator materials for the areas which require a large motion and high energy density. Magnification system of displacement is not necessarily. Another advantage of SMA is that it can be driven simply by heating the actuator elements. Because of these two characteristics the simplification and miniaturization of an actuation system can be easily achieved. Therefore the SMA actuators are suitable for those used under various extreme conditions. Cryogenic shape memory actuators can be useful for gas liquefier （H，He, N，O etc.），gas separation device ，compressor， cryostat，temperature controller，liquid pumps, and so on. Hence they are useful for coming hydrogen society. They may be also various space system applications. Astonishingly, there are very few studies regarding cryogenic shape memory alloy. Since the underlying mechanism of shape memory effect is shape change by martensitic transformation (MT), the information on MT temperature is very important. However, only limited data is available for MT temperatures below LN2 temperature (~77 K). It has been reported that for TiNi martensitic transformation is suppressed if the Ni content exceed 52mol% [1]. Prado et al. reported the Cu-Al-Mn exhibit MT down to 17K[2]. Very few investigations were done on the shape recovery at cryogenic condition. The focus of the present study is to develop a SMA actuator for cryogenic conditions.