イベント
第133回先端計測オープンセミナー
ヘリウムイオン顕微鏡法を用いた電位分布画像化
酒井智香子 NIMSポスドク研究員 (ナノ材料科学環境拠点(GREEN) 計測分野 ナノ表界面計測グループ)
2018年10月29日 (月) 15:00-16:00 / October 29, 2018, 15:00-16:00
会場/Venue：
千現地区 研究本館8階 中セミナー室
Sengen Main Bldg. 8F Middle Seminar Room
Sengen Main Bldg. 8F Middle Seminar Room
講演者/Speaker：
酒井智香子 NIMSポスドク研究員 (ナノ材料科学環境拠点(GREEN) 計測分野 ナノ表界面計測グループ)
Chikako SAKAI, NIMS Postdoctoral Researcher (GREEN, Nano Interface Characterization Group)
Chikako SAKAI, NIMS Postdoctoral Researcher (GREEN, Nano Interface Characterization Group)
表題/Title：
ヘリウムイオン顕微鏡法を用いた電位分布画像化
Electrical Potential Distribution Imaging using Helium Ion Microscopy
Electrical Potential Distribution Imaging using Helium Ion Microscopy
講演要旨/Abstract：
ヘリウムイオン顕微鏡法は、2006年にWardらによって開発された画像化技術である。ナノスケールの高空間分解能や低伝導度性材料の高観察能力を有する。デバイスの電位分布画像化は、デバイスの活性サイトの位置を把握するための直接的な方法である。そこで、高空間分解能での電位分布測定技術の開発を行うことを目的とし、内部電極に電圧を印加した積層型セラミックコンデンサ断面の二次電子(SE)像を、ヘリウムイオン顕微鏡を用いて観察した。SE像に電位差を反映したコントラストが観察された。新しい電位分布計測技術の開発ができたと考える[1, 2]。上記に加え、発表者が物質・材料研究機構での約4年間に行った研究について発表する。
Helium ion microscopy is an imaging technique developed by Ward et al. in 2006. Helium ion microscope (HIM) has high spatial resolution (on the nanometer scale) and high observation ability of the materials with a low conductivity. Electrical potential distribution imaging is a direct method for observing active sites in devices. With the aim of developing a potential distribution measurement technique with high spatial resolution, we observed a secondary electron (SE) images of the cross-sectional surfaces of a multilayer ceramic capacitor (MLCC) with voltages applied to the internal electrodes of the MLCC using HIM. Contrast corresponding to different electrical potentials was observed in SE images. Development of new electrical potential distribution measurement technique was done [1, 2]. In addition to the above, I will present the researches that I have done at National Institute for Materials Science for about 4 years.
[1] C. Sakai et al., Appl. Phys. Lett. 109 (2016) 051603.
[2] C. Sakai et al., J. Vac. Sci. Technol. B 36 (2018) 042903.
Helium ion microscopy is an imaging technique developed by Ward et al. in 2006. Helium ion microscope (HIM) has high spatial resolution (on the nanometer scale) and high observation ability of the materials with a low conductivity. Electrical potential distribution imaging is a direct method for observing active sites in devices. With the aim of developing a potential distribution measurement technique with high spatial resolution, we observed a secondary electron (SE) images of the cross-sectional surfaces of a multilayer ceramic capacitor (MLCC) with voltages applied to the internal electrodes of the MLCC using HIM. Contrast corresponding to different electrical potentials was observed in SE images. Development of new electrical potential distribution measurement technique was done [1, 2]. In addition to the above, I will present the researches that I have done at National Institute for Materials Science for about 4 years.
[1] C. Sakai et al., Appl. Phys. Lett. 109 (2016) 051603.
[2] C. Sakai et al., J. Vac. Sci. Technol. B 36 (2018) 042903.