Prof. Jun HIROTANI
Department of Micro Engineering,
Graduate School of Engineering, Kyoto University
Date & Time: 15:00 - 16:00, March 19th (Wed), 2025.
Place: 8F Middle Conference Room, Main Bldg., Sengen.
Nano/microscale thermal conductivity measurement based on periodic heating methods
Prof. Jun HIROTANI
Department of Micro Engineering,
Graduate School of Engineering, Kyoto University
Abstract:
Increasing heat generation density in semiconductor devices is a critical problem for stable operation in integrated circuits and power devices. It is desirable to obtain internal information via non-contact and non-destructive methods to evaluate the temperature distribution and thermal properties of materials. In addition, the lattice mismatch between substrate and grown materials causes defects in the thickness direction during crystal growth. Therefore, a method for evaluating the thermal properties of thin films with different crystallinities in the thickness direction is also significant. In this presentation, I will present our recent progress in thermal conductivity measurement methods of the frequency-domain thermoreflectance (FDTR) and the 3-omega method. In the first topic, I present an improvement for FDTR measurement systems and show several measurement results. Then, we present our submicron-thick flexible 3-omega sensor in terms of new fabrication method and measurement results. In the last topic, I will introduce a machine learning method to analyze the thermal conductivity profile in the depth direction of a sample based on periodic heating methods such as FDTR and 3-omega measurement.
(Contact)
Yukiko K. Takahashi, Director of Research Center for Magnetic and Spintronic Materials
E-mail: TAKAHASHI.Yukiko[at]nims.go.jp
E-mail: TAKAHASHI.Yukiko[at]nims.go.jp