Facilities

Deposition systems

Ultrahigh vacuum sputtering cluster Ultrahigh vacuum sputtering Thermal evaporation Sputtering



Microfabrication Equipment

Electron beam lithography Mask aligner (1) Mask aligner (2) Ar ion milling



Characterization tools

Vibrating sample magnetometry SQUID High field Micro-Kerr Scanning electron microscopy
PPMS CIPT Old electromagnet High frequency prober