B12：PLDNanoGREEN Bldg. E-506

Maker	Pascal
Model	MC-LMBE
Use for	A PLD system for producing thin films of novel battery materials by laser ablation of solids in vacuum.
Outline	PLD（Pulsed Laser Deposition) Nd:YAG laser ablates solid targets to deposit thin films in vacuum, with substrate heating up to 1,000 °C.

Ablation	Nd:YAG 4th harmonic 70 mJ laser
Heating	Equipped with a 200 W laser
Vacuum Level	10＾-7torr
TTrget Holder	Selectable up to 6 different targets