A6：Laser MicroscopeNanoGREEN Bldg. E-501
|
Maker |
KEYENCE |
|---|---|
|
Model |
VK-X200 |
|
Use for |
Observation of the 3D profile and quantitative feature analysis. |
|
Outline |
3D laser scanning confocal microscope system performs nanometer level profile, roughness and thickness measurements on nearly any material. |
Specification
|
Total magnification |
x200～x24,000 |
|---|---|
|
Optical system for observation/measurement |
Pinhole confocal optical system |
|
Height measurement｜Display resolution |
0.0005 ㎛ |
|
Height measurement｜Measuring range |
7㎜ |
|
Recording Function｜Pixel |
2048x1536,1024x768,1024x64 |
|
Recording Function｜Imaging（monochrome) |
16bit |
|
Recording Function｜Imaging（colour) |
8bit |
|
Recording Function｜Profile measurement |
24bit |
|
Laser beam light source for measurement｜Wavelength |
408nm(Violet Laser) |
|
Laser beam light source for measurement｜Power |
0.95mW |
|
Laser light-receiving element |
PMT（Photoelectron Multiplier Tube） |
|
Light source for optical observation｜Lamp |
100W halogen lamp |
|
Colour camera for optical observation｜Imaging element |
1/3" Colour CCD image sensor |
|
Colour camera for optical observation｜Recording resolution |
Super high resolution (3072×2304) |
|
Colour camera for optical observation｜Auto adjustment |
Gain, Shutter speed |
Notice
- This equipment is installed in the dry room.
