A5：EllipsometerNanoGREEN Bldg. E-501

J.A. WooLLAM

M-2000X

The primary application of ellipsometry is to characterize film thickness, optical constants, band gap, alloy composition and phase structure.

Ellipsometry measures a change in polarization as light reflects or transmits from a material structure. Ellipsometry is primarily used to determine film thickness and optical constants. However, it is also applied to characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response. RCE (rotating compensator ellipsometer) technology to achieve high accuracy and precision, has an amplitude ratio (Ψ) of 0-90°, and a phase difference (Δ) of 0-360° with advanced CCD detection to measure all wavelengths simultaneously.