A31：Scanning Auger Electron SpectroscopyNanoGREEN Bldg. E-108
|
Maker |
ULVAC-PHI |
|---|---|
|
Model |
PHI710 |
|
Use for |
Analysis of the element composition and chemical bonding state of the solid sample surface |
|
Outline |
This system is capable of analyzing the elemental composition and chemical bonding state by irradiating a sample surface with a focused electron beam and analyzing the kinetic energy of the Auger electrons emitted from the surface. The analysis at high spatial resolution up to 8 nm and high magnification up to 500,000 is possible without a sample drift. Samples can be introduced into the analysis chamber from an Ar-filled glove box and/or a dry room via transfer vessel without moisture/air exposure. |
Specification
|
SEM spatial resolution |
≤ 3nm (@25kV, 0.2nA) |
|---|---|
|
AES spatial resolution |
≤ 8nm (@20kV, 1nA) |
|
Sensitivity |
700kcps（CuLMM）@ 10kV，10nA |
|
Energy resolution |
0.5%≥ (HR mode 0.1~0.5%) |
|
Degree of vacuum |
6.7ｘ10-8Pa≥ |
|
Sample stage |
Cooling stage is available |
|
Transportation |
Non-atmospheric exposure analysis is available with transfer-vessel. |
Notice
- As this is an ultra-high vacuum instrument, samples containing volatile components that may contaminate the chamber cannot, in principle, be measured. Please consult us in advance regarding such samples. Samples containing sulfides cannot be measured.
- The high-resolution mode cannot be used due to the installation of the cooling stage.
