A30：SEM_2 StandardNanoGREEN Bldg. E-103
|
Maker |
JEOL |
|---|---|
|
Model |
JSM-7800F |
|
Use for |
SEM observation, EDS/WDS/EBSD measurement |
|
Outline |
High resolution observation (0.8 ㎚ @15 ㎸, 1.2 ㎚ @1 ㎸) is possible with low acceleration voltage (0.01-30 ㎸). Soft x-ray emission from lithium can be detected using a newly developed WDS. Sample transfer without air exposure is possible. |
Specification
|
Resolution |
0.8nm（15kV）,1.2nm（1kV）,3.0nm（15kV、5nA、WD10㎜） |
|---|---|
|
Magnification |
x25 to x1,000,000 |
|
Accelerting Voltage |
0.01kV to 30kV |
|
Probe current |
Several pA to 200nA |
|
Detectors |
UED/LED/USD/BED |
|
Gentle beam |
Built-in |
|
Image display |
Image display area 1,280 x 960 pixel, 800 x 600 pixel |
|
Analizer |
・Energy Dispersive X-ray Spectrometer (EDS) |
|
Specimen stage |
The cooling system is not available. |
|
Unexposing the sample to ambient air |
Transfer vessel is available |
Notice
- As this is an ultra-high vacuum instrument, samples containing volatile components that may contaminate the chamber cannot, in principle, be measured. Please consult us in advance regarding such samples. Samples containing sulfides cannot be measured.
