A29：SEMNanoGREEN Bldg. E-108

Maker	JEOL
Model	JSM-7800F
Use for	SEM observation, EDS/WDS/EBSD measurement
Outline	High resolution observation (0.8 ㎚ @15 ㎸, 1.2 ㎚ @1 ㎸) is possible with low acceleration voltage (0.01-30 ㎸). Soft x-ray emission from lithium can be detected using a newly developed WDS. Sample transfer without air exposure is possible.

Resolution	0.8nm（15kV）,1.2nm（1kV）,3.0nm（15kV、5nA、WD10㎜）
Magnification	x25 to x1,000,000
Accelerting Voltage	0.01kV to 30kV
Probe current	Several pA to 200nA
Detectors	Upper Electron Detector（UED）, Lower Electron Detector（LED）
Gentle beam	Built-in
Image display	Image display area 1,280 x 960 pixel, 800 x 600 pixel
Analizer	・Energy Dispersive X-ray Spectrometer (EDS) ・Wavelength Dispersive X-ray Spectrometer (WDS) ・Electron Backscatter Diffraction (EBSD) ・Soft X-Ray Emission Spectrometer (SXES)
Specimen stage	The cooling system is available
Unexposing the sample to ambient air	Transfer vessel is available

As this is an ultra-high vacuum instrument, samples containing volatile components that may contaminate the chamber cannot, in principle, be measured. Please consult us in advance regarding such samples. Samples containing sulfides cannot be measured.