A27：FIBNanoGREEN Bldg. E-105
|
Maker |
JEOL |
|---|---|
|
Model |
JIB-4501 |
|
Use for |
Fine milling and TEM thin-film sample preparation. |
|
Outline |
The JIB-4601F is a multibeam processing system with a thermionic SEM and a high-performance ion column. The high-power FIB column enables fast milling without any deterioration of the sample using the cryo-stage. The prepared TEM thin-film sample can be mounted to a mesh grid in the glove-box without exposure to ambient air. |
Specification
FIB
|
Ion source |
Ga liquid metal ion source |
|---|---|
|
Accelerating voltage |
1 to 30 kV (in 5 kV steps) |
|
Magnification |
x60 (for searching for a field) |
|
Image resolution |
5nm (at 30kV) |
|
Beam current |
Up to 60nA (at 30kV) |
SEM
|
Electron source |
LaB6 |
|---|---|
|
Accelerating voltages |
0.3 to 30kV |
|
Magnification |
x5 to x300,000 |
|
Image resolution |
2.5nm |
|
Beam current |
1μA (at 30kV) |
Other
|
Specimen Holder |
The liquid N2-cooling stage is available. |
|---|
Notice
- As this is an ultra-high vacuum instrument, samples containing volatile components that may contaminate the chamber cannot, in principle, be measured. Please consult us in advance regarding such samples. Samples containing sulfides cannot be measured.
