Acceleration Voltage: 1300kV, 1000kV, 800kV, 600kV, 400 kV

Electron Gun: LaB₆

Point Resolution :

• 0.10nm (1300kV)
• 0.12 nm (1000kV)
• 0.14 nm ( 800 kV)

Specimen Holder:

• Top-entry holder (room temperature)
• Side-entry holder (cooling Liquid N₂)
• Side-entry holder (cooling Liquid He)
• Side-entry holder (heating)

Recording media: Film, Imaging Plate, CCD-Camera(TV-rate)

Since 1990