Fig.1 Simplified illustration of dry etching using positivephotoresist during a photolithography method.STEM-HAADF imageA.C.Wulff. SUST34, 053003P2-1483A bottom-up method enables ultra-thin wires (filament size ～20 μm) without damage due to post-processing.SEM-EBSD imageMO imageFabrication of stripe structures using various materialsApplication to metal substrates for longer lengthsEvaluation of AC lossesFabrication of superconducting coilsA pattern was formed on the substrate using a photolithography techniqueA superconducting phase and a non-superconducting phase could be intentionally fabricatedYBCO with different orientations are formed on the ZrKey Words: HTS wire/tape, REBCO, Ultra thin filamentsKey Words: HTS wire/tape, REBCO, Ultra thin filamentsTheme underDiscussionDiscussionNew(bottom-up) method of filamentationup) method of filamentationResultsConclusionFuture PlanA.C.Wulff. SUST34, 053003High-temperature superconducting (HTS)-coated conductors (CCs)can be applied tomagnets under low temperature and high magnetic field conditions, as well as in electricpower equipment. However, owing to the extremely high critical current density of HTS-CCs,it is necessary to reduce the screening current and AC loss.The photolithography technology was diverted to pattern fabrication for multi-filamentarysuperconducting cores. We used STO (100) as the substrate in this time. Zr which is non-superconducting stripe that enables pattern formation by photolithography, was formed onthis substrate by sputtering method. Subsequently, a YBCO thin film was deposited on it bythe pulse laser deposition method.Superconducting System Group, GREEN Akiyoshi MatsumotoE-mail：： MATSUMOTO.Akiyoshi@nims.go.jpIntroductionDevelopment of multifilamentary high-Development of multifilamentary high-temperature superconducting tape for temperature superconducting tape for compact fusion reactorscompact fusion reactors
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