80Poster Award NomineeP4-17High Resolution and High Probe Current Electron Microscopy Application for LaB6 Nanostructured Emitter Han ZhangCenter for Basic Research on Materials, National Institute for Materials Science (NIMS) Electron microscopy applications, especially industrial use, demands both high resolution and high throughput (high probe current). It is vital to find an electron source with both brightness and monochromaticity as high as possible. Conventionally available electron sources, including thermionic electron source, Schottky electron source and W(310) cold field emission electron source, with their respective limitations, are insufficient to help overcome current technology barrier. We will introduce a new type of ultrahigh brightness cold field electron source made of low work function LaB6 single crystalline nanowire. We will first go over how nanostructured electron source surpasses conventional counterparts as a mechanistic discussion of basic emission properties. Then application examples in commercial S(TEM), SEM and semiconductor inspection instruments will be demonstrated. [1] H. Zhang, Nature Nanotechnology, 11, 273 (2016). [2] H. Zhang, Nature Nanotechnology, 17, 21 (2021).
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