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Lithography |
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EB lithography system, Laser lithography system, Mask aligner, Plasma asher, UV ozone cleaner |
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Thin film deposition, Thermal processing |
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12 EB evaporator, Sputter-depo. system, UHV EB evaporator, UHV sputter-depo. system, ALD system, SiO2-PECVD system, RTA system, Thermal oxide and annealing furnace |
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Dry etching |
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Multipurpose RIE, Compounds RIE, Oxide RIE, Silicon deep RIE |
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FIB, Measurement |
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FIB–SEM hybrid system, FIB system, FE–SEM, Coating system, AFM, Ellipsometer, Surface profiler, Laser Raman microscope, 3D-measurement laser microscope |
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Cutting, Polishing, Device characterization |
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Wafer scribing system, Wafer breaking system, CMP system, Manual probe system, Wire bonder, Diamond wire-saw |
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