Insulator on diamond for electronic devices: from capacitor to logic inverter

Jiangwei Liu

ICYS-NAMIKI Researcher

Diamond has some excellent intrinsic properties such as a wide band gap, a high thermal conductivity, high carrier mobility, and a large breakdown field. It is considered a promising material for the fabrication of high-power and high-frequency electronic devices. Many diamond-based electronic devices have fabricated on hydrogenated diamond (H-diamond) epitaxial layers, which accumulate holes on the surface with sheet hole density as high as 10¹⁴ cm^-2. In this talk, I will show our recent studies of insulator on H-diamond for the fabrication of capacitors, field-effect transistors, and logic inverters.