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The 133rd AMCP Open Seminar

Electrical Potential Distribution Imaging using Helium Ion Microscopy

Schedules 2018.10.29 Finished


Date & Time

Monday, October 29, 2018, 15:00-16:00

Venue

National Institute for Materials Science (NIMS)
Sengen Main Bldg. 8F Middle Seminar Room→ access

Registration

Pre-registration is not required.
For inquiries, please contact the Administrative Office.
This lecture is open to the public. Your participation is strongly encouraged.

Speaker

SAKAI Chikako, NIMS Postdoctoral Researcher (GREEN, Nano Interface Characterization Group) 

Title

Electrical Potential Distribution Imaging using Helium Ion Microscopy

Abstract

Helium ion microscopy is an imaging technique developed by Ward et al. in 2006. Helium ion microscope (HIM) has high spatial resolution (on the nanometer scale) and high observation ability of the materials with a low conductivity. Electrical potential distribution imaging is a direct method for observing active sites in devices. With the aim of developing a potential distribution measurement technique with high spatial resolution, we observed a secondary electron (SE) images of the cross-sectional surfaces of a multilayer ceramic capacitor (MLCC) with voltages applied to the internal electrodes of the MLCC using HIM. Contrast corresponding to different electrical potentials was observed in SE images. Development of new electrical potential distribution measurement technique was done [1, 2]. In addition to the above, I will present the researches that I have done at National Institute for Materials Science for about 4 years.


[1] C. Sakai et al., Appl. Phys. Lett. 109 (2016) 051603.
[2] C. Sakai et al., J. Vac. Sci. Technol. B 36 (2018) 042903.



Summary

Event Title
The 133rd AMCP Open Seminar
Electrical Potential Distribution Imaging using Helium Ion Microscopy
Venue
National Institute for Materials Science (NIMS)
Sengen Main Bldg. 8F Middle Seminar Room
Schedules Hours
2018.10.29
15:00~16:00
Registration Fee
Free

Contact

Research Center for Advanced Measurement and Characterization Administrative Office
National Institute for Materials Science
1-2-1 Sengen, Tsukuba, Ibaraki, 305-0047, Japan
Tel:81-29-859-2643/2839
Fax:81-29-859-2801
E-Mail: amc=ml.nims.go.jp(Please change "=" to "@")
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